MyJournals Home  

RSS FeedsAlgorithms, Vol. 11, Pages 90: A Novel Method for Control Performance Assessment with Fractional Order Signal Processing and Its Application to Semiconductor Manufacturing (Algorithms)

 
 

15 august 2018 10:01:43

 
Algorithms, Vol. 11, Pages 90: A Novel Method for Control Performance Assessment with Fractional Order Signal Processing and Its Application to Semiconductor Manufacturing (Algorithms)
 


The significant task for control performance assessment (CPA) is to review and evaluate the performance of the control system. The control system in the semiconductor industry exhibits a complex dynamic behavior, which is hard to analyze. This paper investigates the interesting crossover properties of Hurst exponent estimations and proposes a novel method for feature extraction of the nonlinear multi-input multi-output (MIMO) systems. At first, coupled data from real industry are analyzed by multifractal detrended fluctuation analysis (MFDFA) and the resultant multifractal spectrum is obtained. Secondly, the crossover points with spline fit in the scale-law curve are located and then employed to segment the entire scale-law curve into several different scaling regions, in which a single Hurst exponent can be estimated. Thirdly, to further ascertain the origin of the multifractality of control signals, the generalized Hurst exponents of the original series are compared with shuffled data. At last, non-Gaussian statistical properties, multifractal properties and Hurst exponents of the process control variables are derived and compared with different sets of tuning parameters. The results have shown that CPA of the MIMO system can be better employed with the help of fractional order signal processing (FOSP).


 
95 viewsCategory: Informatics
 
Algorithms, Vol. 11, Pages 91: emgr--The Empirical Gramian Framework (Algorithms)
Algorithms, Vol. 11, Pages 89: Degradation Trend Prediction for Rotating Machinery Using Long-Range Dependence and Particle Filter Approach (Algorithms)
 
 
blog comments powered by Disqus


MyJournals.org
The latest issues of all your favorite science journals on one page

Username:
Password:

Register | Retrieve

Search:

Informatics


Copyright © 2008 - 2024 Indigonet Services B.V.. Contact: Tim Hulsen. Read here our privacy notice.
Other websites of Indigonet Services B.V.: Nieuws Vacatures News Tweets Nachrichten