Sensors, Vol. 19, Pages 1888: Three-to-One Internal Resonance in MEMS Arch Resonators (Sensors)

We present an investigation of the nonlinear dynamics of a microelectromechanical system (MEMS) arch subjected to a combination of AC and DC loadings in the presence of three-to-one internal resonance. The axial force resulting from the residual stress or temperature variation is considered in the governing equation of motion. The method of multiple scales is used to solve the governing equation. A four first-order ordinary differential equation describing the modulation of the amplitudes and phase angles is obtained. The equilibrium solution and its stability of the modulation equations are determined. Moreover, we also obtain the reduced-order model (ROM) of the MEMS arch employing the Galerkin scheme. The dynamic response is presented in the form of time traces, Fourier spectrum, phase-plane portrait, and Poincare sections. The results show that when there is an internal resonance, the energy transfer occurs between the first and third modes. In addition, the response of the MEMS arch presents abundant dynamic behaviors, such as Hopf bifurcation and quasiperiodic motions.