Sensors, Vol. 19, Pages 4100: Calibration of Displacement Laser Interferometer Systems for Industrial Metrology (Sensors)

Displacement laser interferometer systems are widely used for the calibration of machine tools and CMMs (Coordinate Measuring Machines). Additionally, they are often the workhorse in dimensional calibration laboratories, where they act as the basic metrological traceability link for many calibrations. This paper gives a review of the calibration of such systems, where several approaches, such as the calibrations of separate components or the system as a whole, are reviewed. The calibrations discussed are: the laser frequency, the counting system, software evaluation of the environmental conditions, environmental and material temperature sensor calibration and the calibration of optics that is part of the system. For these calibrations considerations are given about the ways these can be carried out and about establishing the re-calibration intervals.