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RSS Feeds[ASAP] Composition and Properties Control Growth of High-Quality GaOxNy Film by One-Step Plasma-Enhanced Atomic Layer Deposition (Chemistry of Materials)

 
 

13 september 2019 19:01:03

 
[ASAP] Composition and Properties Control Growth of High-Quality GaOxNy Film by One-Step Plasma-Enhanced Atomic Layer Deposition (Chemistry of Materials)
 


Chemistry of MaterialsDOI: 10.1021/acs.chemmater.9b02061


 
212 viewsCategory: Chemistry
 
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