Sensors, Vol. 19, Pages 4346: Improved Optical Waveguide Microcantilever for Integrated Nanomechanical Sensor (Sensors)

This paper reports on an improved optical waveguide microcantilever sensor with high sensitivity. To improve the sensitivity, a buffer was introduced into the connection of the input waveguide and optical waveguide cantilever by extending the input waveguide to reduce the coupling loss of the junction. The buffer-associated optical losses were examined for different cantilever thicknesses. The optimum length of the buffer was found to be 0.97 μm for a cantilever thickness of 300 nm. With this configuration, the optical loss was reduced to about 40%, and the maximum sensitivity was more than twice that of the conventional structure.